ACM Research
Architecture Firm/Engineering Firm - Fremont, CA, US
ACM Research Details
Founded in 1998 in Silicon Valley, ACM Research, Inc. provides wet processing technology, systems, and key manufacturing products targeted to a range of semiconductor IC manufacturing and wafer-level packaging applications. The company specializes in developing cleaning technologies for advanced semiconductor device manufacturing.Known for its expertise in ultra-low-K dielectric and copper integration, the company initially focused on stress-free copper polishing technology. Its first product was introduced in 2001 and sold to leading-edge wafer manufacturers in the U.S. In 2003, to address increasing challenges in defect reduction that plagued emerging generations of IC chips, ACM Research developed its innovative single-wafer cleaning equipment, which features the company's proprietary Space Alternated Phase Shift (SAPS™) and Timely Energized Bubble Oscillation (TEBO™) megasonic cleaning technologies. In particular, ACM's revolutionary TEBO technology is enabling future generations of semiconductor capability. These capabilities are delivered on high-throughput chamber and platform designs.In September 2006, ACM expanded its operations into Asia, and formed the subsidiary ACM Research (Shanghai), Inc. The company offers complete R&D, and engineering and manufacturing operations at its Zhangjiang Hi-Tech Park facility in Shanghai.Product LinesIC:FEOL Single-Wafer CleanBEOL Single-Wafer CleanBackside CleanBench PR StripperWet BenchSingle Wafer RecycleECPSFPFurnaceAdvanced WLP:CoaterDeveloperPR StripperScrubberWet EtcherECPFurnaceWafer Manufacturing:Single-Wafer CleanSingle-Wafer Wet EtcherFurnace
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